Tensile Compression Mechanical Test Fixture with Submicron Tolerance for Use with Capacitive Guage

Utah State University is seeking an industry partner interested in licensing a technology that is capable of carrying out strength and performance tests on micro-sized devices. In the world of micro electromechanical systems (MEMS), devices continue to shrink. Demand for accurate and reliable performance modeling of small scale devices, in contrast, is growing. The need to understand the properties of these materials is important because the properties of micro-portions of materials often differ from those of larger specimens. Developed at Utah State University, a new fixture technology overcomes the problems previously associated with materials testing by solving issues related to specimen preparation and gripping, application of forces, and the measurement of displacements or strains. The new method utilizes existing equipment thereby eliminating the need to purchase expensive and specialized machines. The fixture will accelerate the development of microelectromechanical systems and materials.

Testing within sub-micron tolerances for:

  • Experimental solid mechanics
  • Microelectromechanical systems
  • Thin films

  • Ability to measure the mechanical properties of specimens whose minimum dimensions are on the order of micrometers, creating new research possibilities
  • Adaptable for use with existing test equipment, eliminating the need to purchase expensive new machines
  • Uses capacitive gauges allowing for extremely sensitive measurements and greater reliability, thereby increasing the efficiency and quality of gathered data
  • Can perform multi-point torsion strain tests that are not possible with currently available technologies


US 8,096,191

Patent Information:
Electrical and Electronics
For Information, Contact:
Christian Iverson
Utah State University
Leila Ladani Jafar Razmi
Circuits and Systems Electrical Engineering/Electronics